설치 보고서

DVIA-ULF Series

01-07-2026

Goertek Inc. ZEISS Sigma 300 DVIA-U1000 (220919R6-1) Installation Report

DVIA-U Series

Installation Report

Goertek

ZEISS

Sigma 300

DVIA-U1000

220919R6-1

개요

Re-tuning was performed due to Z-axis oscillation.

DVIA-U1000 stability was secured by reducing the gain values.

진동 절연 시스템 정보

Model: DVIA-ML1000

Serial Number: 220919R6-1

엔지니어

Chaewon Lee DAEIL SYSTEMS

튜닝 날짜

December 19, 2025

보고서 작성일

26.01.07

최종 사용자

Goertek Inc.

튜닝 시도 횟수

2nd

위치

N/A

장비

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 300

장비 상태

The equipment is turned on/IDLE

튜닝 요청

N/A

UI 프로그램을 통해 얻은 측정 데이터

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

장비 사진

Photo Not Allowed

참조

기준 곡선	설명	진폭 μm/s (µin/s)	상세 크기 μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

참고:

1. VC-A/B는 8-80 Hz, VC-C~VC-G는 1-80 Hz 범위의 1/3 옥타브 밴드에서 측정.

2. 상세 크기는 마이크로일렉트로닉스 제조의 선폭 또는 의료 연구의 입자 크기를 의미합니다.

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