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설치 보고서
DVIA-ML Series
09-20-2023

Jiangsu Shekoy Semiconductor New Materical NX5000En DVIA-M3000 (220919R4-2) Installation Report

DVIA-ML Series
Installation Report
Jiangsu Shekoy Semiconductor
NX5000En
Yixing
DVIA-M3000
220919R4-2

Jiangsu Shekoy Semiconductor New Materical Co., Ltd.

(M3000_ 220919R4-2 Set up)

현장 확인 항목

Target equipmentNX5000En
Place of installationYixing
RemarkGood Performance
END USERJiangsu Shekoy Semiconductor New Materical Co., Ltd.

운영자 및 일정

Operator: Jongwon Park Date of setup: 23.09.20 Date of reporting: 23.09.21

Date of business trip : 17.12.27~17.12.29

개요

Overview The DVIA-M3000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.09.20 (Wednesday), Operator: DAEIL SYSTEMS, Jongwon Park Place of measurement: Yixing Equipment Model: NX5000En

M3000 내부 프로그램 성능 측정 결과

Z axis

X axis

Y axis

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카테고리
설치 보고서
시리즈DVIA-ML Series
작성일09-20-2023
태그
DVIA-ML Series
Installation Report
Jiangsu Shekoy Semiconductor
NX5000En
Yixing
DVIA-M3000
220919R4-2