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설치 보고서
DVIA-P Series
05-21-2026

Tier-1 Semiconductor Hwaseong NRD AIMS 1x DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
ZEISS
AIMS 1x
DVIA-P4000

Contents

개요

이전 방문 튜닝 시와 비교했을 때보다 진동 레벨이 악화되었음.

추후 방문하여 Zeiss 장비를 Turn off 한 상태로 제진대의 동작 및 성능이 정상적으로 출력되는지 확인 예정.

시스템 정보

Model: DVIA-P4000

Serial Number: 220804R2

엔지니어

Youngha Lee from DAEIL SYSTEMS

Tuning date: 23.09.20; Report written date: 23.09.21; Date of business trip: 17.12.27~17.12.29

점검 및 튜닝 일자

September 21, 2023

설치 장소

Tier-1 Semiconductor NRD Line 3F, Hwaseong

적용 장비

AlMs 1x

진동 결과 요약

Measurement PointZ-axis (Vertical) 1-10 HzZ-axis (Vertical) 10-80 HzX-axis (Left to Right) 1-10 HzX-axis (Left to Right) 10-80 HzY-axis (Front to Back) 1-10 HzY-axis (Front to Back) 10-80 Hz
FloorGDDDDC
ActiveECDCDB

데이터 및 이미지

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

참조

기준 곡선설명Amplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

참고:

1. VC-A/B는 8–80 Hz 1/3 옥타브 밴드, VC-C~G는 1–80 Hz 기준입니다.

2. Detail size는 반도체 라인폭 또는 의료 연구 입자 크기를 뜻합니다.

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케이스 스터디 정보

카테고리
설치 보고서
시리즈DVIA-P Series
작성일05-21-2026
태그
DVIA-P Series
Installation Report
Tier-1 Semiconductor
ZEISS
AIMS 1x
DVIA-P4000

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