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설치 보고서
DVIA-P Series
05-21-2026

Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report

DVIA-P Series
Inspection Report
Sungkyunkwan University
Raith
EBPG5150
DVIA-P4000

개요

DVIA-P4000 사용 중 Caution VIB LED가 점등되어 점검 요청받음

점검 중 Z축에서 발진 현상이 발생하고 있음을 확인

담당자로부터 이전에 장비 부품 교체 작업이 있었다고 전달받음

새로운 공진봉이 추가되어 발진 현상 발생으로 추측

Feedback, Feedforward 재 튜닝 진행완료(성능 양호)

시스템 정보

모델: DVIA-P4000

시리얼 넘버: 220714R4

엔지니어

Youngha Lee from DAEIL SYSTEMS

Prepared by: Youngha Lee (튜닝일 23.11.28, 보고서 작성일 23.11.30, Date of business trip: 17.12.27~17.12.29)

점검 일자

November 28, 2023

설치 위치

Sungkyunkwan University Research Building 3F C/R

장비

Raith EBPG5150

진동 결과 요약

측정 지점Z축(수직) 1-10 HzZ축(수직) 12.5-80 HzX축(좌-우) 1-10 HzX축(좌-우) 12.5-80 HzY축(전-후) 1-10 HzY축(전-후) 10-80 Hz
FloorDAFEED
ActiveDCFDED

장비 Turn off 불가 상황으로 인해 고주파 대역의 Top 측정값이 다소 높게 출력됨

데이터 및 이미지

Z axis Transmissibility Graph

X axis Transmissibility Graph

Y axis Transmissibility Graph

Z-axis (Vertical) VC curves

X-axis (Left to Right) VC curves

Y-axis (Front to Back) VC curves

참조

기준 곡선설명Amplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

참고:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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카테고리
설치 보고서
시리즈DVIA-P Series
작성일05-21-2026
태그
DVIA-P Series
Inspection Report
Sungkyunkwan University
Raith
EBPG5150
DVIA-P4000