Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Installation Report
Contents
개요
보고 대상: Sungkyunkwan University
The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.
시스템 정보
모델: DVIA-P4000
시리얼 넘버: 220714R4
엔지니어
Prepared by: Youngha Lee, Sangjae Lee (튜닝일 23.02.03, 보고서 작성일 23.02.03)
Date of business trip : 17.12.27~17.12.29
Yeongha Lee and Sangjae Lee from DAEIL SYSTEMS
튜닝 일자
Feb. 03, 2023
설치 위치
Sungkyunkwan University 3rd floor, Cleanroom
장비
Raith EBPG5150
측정 장비
6.1) PULSE 22
Hardware: Bruel & Kjaer Type 3050-A-040
Software: LapShop Application(PULSE Lapshop)
6.2) Acceleration Sensor
PCB Accelerometer
Model: 393B05
진동 결과 요약
| 측정 지점 | Z축(수직) 1-10 Hz | Z축(수직) 10-80 Hz | X축(좌-우) 1-10 Hz | X축(좌-우) 10-80 Hz | Y축(전-후) 1-10 Hz | Y축(전-후) 10-80 Hz |
|---|---|---|---|---|---|---|
| Floor | E | B | F | E | F | E |
| Active | G | C | G | D | G | D |
데이터 및 이미지
Due to a request from the Raith representative, the Raith equipment cannot be turned off, resulting in vibration from the upper pump occurring at around the 46 Hz band.
=> Consequently, the VC curve in the 40 Hz band shows a higher measurement on the top plate.
9.1 Pump vibration measurement
Z axis
X axis
Y axis
Transmissibility Graph
A resonance peak occurs at 20 Hz on the horizontal axis, resulting in poor performance in that frequency band.
9.3 VC Curve Graph
Z-axis (Vertical) VC-Curve
X-axis (Left to Right) VC-Curve
Y-axis (Front to Back) VC-Curve
참조
Generic Vibration Criteria
참고:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
