설치 보고서
DVIA-ML Series
04-17-2023
Zhonghuan Advanced Semiconductor Materials Cameca IMS-6f-E7 DVIA-M3000 (210506R1) Installation Report
DVIA-ML Series
Installation Report
Zhonghuan Advanced Semiconductor Materials
Cameca
IMS-6f-E7
YIXING
DVIA-M3000
210506R1
목차
Zhonghuan Advanced Semiconductor Materials Co., Ltd.
(M3000_ 210506R1 Set up)
현장 확인 항목
| Target equipment | cameca_ims-6f-e7 |
|---|---|
| Place of installation | YIXING |
| Remark | Good Performance |
| END USER | Zhonghuan Advanced Semiconductor Materials Co., Ltd. |
운영자 및 일정
Operator: Lee, Young Ha Date of setup: 23.04.17 Date of reporting: 23.04.17
Date of business trip : 17.12.27~17.12.29
개요
Overview The DVIA-M3000 active vibration isolation platform is appropriately installed and functioning as intended. Measurement date: 2023.04.17 (Monday), Operator: DAEIL SYSTEMS, Youngha Lee Place of measurement: YIXING Equipment Model: cameca_ims-6f-e7
MB3000 내부 프로그램 성능 측정 결과
Z axis
X axis
Y axis
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카테고리
설치 보고서
시리즈DVIA-ML Series
작성일04-17-2023
태그
DVIA-ML Series
Installation Report
Zhonghuan Advanced Semiconductor Materials
Cameca
IMS-6f-E7
YIXING
DVIA-M3000
210506R1
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