Chan Zuckerberg Imaging Institute MB1000 Helios/Hydra Installation Report (2024-03-07)
Contents
Introduction
본 보고서는 3400 Bridge Parkway, Redwood City, CA 94065에 있는 TFS Helios/Hydra용 MB1000 설치 내역을 제공합니다. Chan Zuckerberg Imaging Institute는 VEC에 진동 제진 시스템 설치 및 완료 보고를 의뢰했습니다.
Summary Results
Below is a summary of the results:
MB1000 ON PASSED the Vibration specifications
Product Details
| Part Delivered | Serial Number | Software |
|---|---|---|
| MB1000 | 240110R3 | Site-specific Tune |
Summary of Work
We installed the system by
Positioning the daeil under the microscope
Leveling the daeil to within .5mm
Attaching seismic restraints between the floor and the daeil
Connecting the seismic restraints between the daeil and the tool
We tested the system by
Creating and uploading a site specific tune
Collecting vibration data to verify the performance
We left the system
In position and on
Procedures
Vibration
VEC conducted vibration measurements in three directions. Acceleration measurements were taken at a bandwidth of 250Hz with units of G (RMS). The acceleration spectra with 250Hz bandwidths were recorded.
Setup
| Vibration | |
|---|---|
| Bandwidth | 250Hz |
| Lines | 3200 |
| Window | Hanning |
| Coupling | ICP 2mA |
| Average Type | Stable |
| Duration | 60 seconds |
| Engineering Units | G (RMS) |
Data
Figure 1: Vibration (Z-Axis - Floor)
Figure 2: Vibration (Z-Axis - Table)
Figure 3: Vibration (Z-Axis – Floor, Table and Specification)
Figure 4: Vibration (Z-Axis - Transmissibility)
Figure 5: Vibration (Y-Axis - Floor)
Figure 6: Vibration (Y-Axis - Table)
Figure 7: Vibration (Y-Axis – Floor, Table and Specification)
Figure 8: Vibration (Y-Axis - Transmissibility)
Figure 9: Vibration (X-Axis - Floor)
Figure 10: Vibration (X-Axis - Table)
Figure 11: Vibration (X-Axis – Floor, Table and Specification)
Figure 12: Vibration (X-Axis - Transmissibility)
Figure 13: Room (View 1)
Figure 14: Room (View 2)
Figure 15: Microscope (View 1)
Figure 16: Microscope (View 2)
Figure 17: Microscope (View 3)
Reference
참고:
1. VC-A/B는 8-80 Hz, VC-C~VC-G는 1-80 Hz 범위의 1/3 옥타브 밴드에서 측정.
2. 세부 크기는 마이크로일렉트로닉스 제조에서의 선폭 또는 의료 연구에서의 입자 크기를 의미합니다.
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