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설치 보고서
DVIA-M Series
12-09-2019

Hugong Heavy Machinery (沪工重机) ZEISS-EVO18 DVIA-MB1000 (MB1000 P125 / 190531R4) worksheet — 2019.12.09

DVIA-M Series
Installation Report
Hugong Heavy Machinery
ZEISS
EVO18
DVIA-MB1000
MB1000
P125
190531R4
FIBERHOME

Hugong Heavy Machinery (沪工重机)

沪工重机

(MB1000_190531R4 Set up)

현장 확인 항목

Target equipmentZEISS-EVO18
Place of installationF1, 沪工重机
RemarkGood Performance
END USER沪工重机

운영자 및 일정

Operator: Choi, Hyoung Mun

Date of setup : 19.12.04

Date of reporting : 19.12.09

Date of business trip : 17.12.27~17.12.29

개요

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 2019.12.04 (Wed),

Operator: Daeil System, Manager Choi, Hyoung Mun

Place of measurement : F1, FIBERHOME R&D CENTER

Equipment Model: ZEISS-EVO18

측정 조건 및 결과

N/A

측정 결과 요약

Test ConditionVC-Class ZVC-Class XVC-Class Y
FloorDDD
Above ActiveGDD

Good omnidirectional performance.

60Hz vibration caused by SEM equipment

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Octave Band Result (BASE: Floor, TOP: Above Active)

Octave Band Result — Z axis

Octave Band Result — X axis

Octave Band Result — Y axis

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카테고리
설치 보고서
시리즈DVIA-M Series
작성일12-09-2019
태그
DVIA-M Series
Installation Report
Hugong Heavy Machinery
ZEISS
EVO18
DVIA-MB1000
MB1000
P125
190531R4
FIBERHOME