설치 보고서
DVIA-M Series
09-20-2019
Institute of Novel Metals and Applied Technologies DVIA-MB1000 Zeiss GeminiSEM 500 (SN 190325R6) — 2019-09-20
DVIA-M Series
Installation Report
DVIA-MB1000
INMAT
GeminiSEM 500
Zeiss
SEM
190325R6
DVIA-MB
목차
Target equipment
ZEISS GeminiSEM 500
Place of installation
F1, INMAT
Remark
Good Performance
END USER
INMAT
Operator
Choi, Sung Won
Date of setup
19.09.18
Date of reporting
19.09.20
Date of business trip
17.12.27~17.12.29
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Measurement date: 2019.09.18 (wednesday),
Operator: Daeil System, Manager Sung Won Choi
Place of measurement : F1, INMAT
Equipment Model: ZEISS GeminiSEM 500
Measurement conditions and results
Summary of measurement results
VC-Class
| Z | X | Y | |
|---|---|---|---|
| Floor | D | E | F |
| Above Active | G | F | F |
Good omnidirectional performance.
There is 50Hz vibration on top plate. It can be caused by acoustic or direct force.
MB1000 internal program performance measurement result
Z axis (MB1000 internal program performance measurement result)
X axis (MB1000 internal program performance measurement result)
Y axis (MB1000 internal program performance measurement result)
Octave Band Result (BASE: Floor, TOP: Above Active)
Z axis (Octave Band Result (BASE: Floor, TOP: Above Active))
X axis (Octave Band Result (BASE: Floor, TOP: Above Active))
Y axis (Octave Band Result (BASE: Floor, TOP: Above Active))
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설치 보고서
시리즈DVIA-M Series
작성일09-20-2019
태그
DVIA-M Series
Installation Report
DVIA-MB1000
INMAT
GeminiSEM 500
Zeiss
SEM
190325R6
DVIA-MB
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