Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL DVIA-P4000 Installation Report
Contents
Overview
- Tuning and vibration measurement were performed on the DVIA-PB4000 installed on the 2nd floor of S1 Line, K2, Tier-1 Semiconductor Fabrication Facility Giheung Campus.
- Tuning and vibration measurement were conducted to verify the normal operation of the vibration isolation platform prior to equipment installation.
- Data is presented as VC Curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-PB4000
Serial Number: 251204R2
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
February 26, 2026
Installation Site
Tier-1 Semiconductor Fabrication Facility Giheung, Korea
End User
Tier-1 Semiconductor Fabrication Facility
Equipment
Manufacturer: Tokyo Electron
Equipment: Wafer Prober
Model: Precio XL
Vibration Specifications
VC-E
Equipment Status
Equipment is not installed.
Measuring Equipment
Data Physics DAQ
- Hardware: QUATTRO, Serial Number: 22436
- Software: SignalCalc ACE
Accelerometer: PCB 393B05
Measuring Set-up
- F Span: 200 Hz
- Lines: 3200
- Engineering Units: m/s
- Window: Hanning
- Averaging: FFT Spectrum Averaging
- Averaging mode: Exponential, 40
Vibration Isolation System Checklist
| No. | Inspection Item | Acceptance Criteria | Result |
|---|---|---|---|
| 13.1 | Displacement Sensor Setting | Z: 1.0 mm / X, Y: 3.0mm | ✓ PASS |
| 13.2 | Float Height | 2.5 mm | ✓ PASS |
| 13.3 | Servo Valve Output | 1.0 V – 8.0V | ✓ PASS |
Displacement Sensor Setting Image
Float Height Image
Servo Valve Output Image
Conclusion
- Tuning and vibration measurements were conducted to verify the normal operation of the vibration isolation system without equipment installed. The DVIA-PB4000 model is characterized by not fully delivering its designed vibration isolation performance when no equipment is mounted on top.
- The tuning and measurement results showed that certain frequency bands in some directions exceeded the vibration specifications; however, this is a phenomenon that occurs in the unloaded condition. It is expected that all frequency bands in all directions will meet the vibration specifications once the equipment is installed and re-tuning is performed under normal operating conditions.
- As the purpose of this inspection was to verify the operational status and normal functioning of the vibration isolation system, it has been confirmed that there are no issues with the system itself.
Measurement Data
| Measuring Point | Status | Direction | Measurement Data | Result | ||
|---|---|---|---|---|---|---|
| Floor | DVIA-PB4000 | Floor | DVIA-PB4000 | |||
| S1 Line, K2, Tier-1 Semiconductor Fabrication Facility Giheung Campus 1. Floor Vibration 2. DVIA-PB4000 | Equipment not installed | Vertical | VC-B @ 12.5 Hz | VC-E @ 12.5 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-D @ 20 Hz | VC-C @ 20 Hz | ✗ FAIL | ✗ FAIL | ||
| Front to Back | VC-B @ 12.5 Hz | VC-E @ 12.5 Hz | ✗ FAIL | ✓ PASS | ||
Data and Image
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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