Tier-1 Semiconductor Giheung K2 S1 Tokyo Electron Precio XL DVIA-P4000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-PB4000 installed at Tier-1 Semiconductor Giheung site K2 S1 line 2nd floor.
Tuning and vibration measurement were conducted to verify normal operation of the vibration isolation platform before equipment installation.
Data are presented as VC Curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 251204R2
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
February 26, 2026
Installation Site
Tier-1 Semiconductor Giheung site K2 S1 line 2nd floor
End User
Tier-1 Semiconductor
Customer Equipment
Manufacturer: Tokyo Electron
Equipment: Wafer Prober
Model: Precio XL
Equipment Specifications
VC-E
Equipment Status
Equipment not installed
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Vibration Isolation System Checklist
All inspection items met the acceptance criteria and the final result is Pass.
| No. | Inspection Item | Acceptance Criteria | Result |
|---|---|---|---|
| 13.1 | Displacement Sensor Setting | Z: 1.0 mm / X, Y: 3.0mm | ✓ PASS |
| 13.2 | Float Height | 2.5 mm | ✓ PASS |
| 13.3 | Servo Valve Output | 1.0 V – 8.0V | ✓ PASS |
Displacement Sensor Setting
Float Height
Servo Valve Output
Conclusion
With the equipment not yet installed, tuning and vibration measurement were performed to verify normal operation of the vibration isolation platform. For the DVIA-PB4000 model, designed isolation performance is not fully expressed when no equipment is mounted on top.
Tuning and measurement showed frequency bands in some directions that exceeded the vibration specification; this behavior occurs when no equipment is mounted. After the equipment is installed and re-tuning is performed under normal conditions, the vibration specification is expected to be met across all directions and frequency bands.
The objective of this inspection was to confirm the isolator drive condition and normal operation; no abnormality was found with the isolator itself.
Measurement Data
| Measuring Point | Status | Direction | Spec | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-PB4000 | Floor | DVIA-PB4000 | ||||
| Tier-1 Semiconductor Giheung site K2 S1 line 2nd floor 1. Floor vibration 2. DVIA-PB4000 | Equipment not installed | Vertical | VC-E | VC-B @ 12.5 Hz | VC-E @ 12.5 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-E | VC-D @ 20 Hz | VC-C @ 20 Hz | ✗ FAIL | ✗ FAIL | ||
| Front to Back | VC-E | VC-D @ 12.5 Hz | VC-E @ 12.5 Hz | ✗ FAIL | ✓ PASS | ||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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