Installation Report

DVIA-M Series

11-21-2024

Yonsei University Unisoki Low Temperature SPM USM1200 DVIA-ML1000 (240821R5) Installation Report

DVIA-M Series

Installation Report

Yonsei University

Unisoki

SPM

USM1200

DVIA-ML1000

240821R5

Overview

Tuning and vibration measurement were performed for the DVIA-ML1000 installed at Yonsei University Advanced Science and Technology Research Building.

After equipment placement, vibration measurement and tuning were conducted with the equipment in IDLE state.

Performance verification was carried out by vibration measurement using Brüel & Kjær DAQ equipment.

Data are presented as VC curves, and reference material on vibration levels is provided.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 240821R5

Engineer

Chaewon Lee, DAEIL SYSTEMS Field Engineer

Tuning Date

November 19, 2024

Report written date

November 21, 2024

Prepared for

N/A

End User

Yonsei University

Number of Tuning Trial

N/A

Location

Quantum Imaging Laboratory, Advanced Science and Technology Research Building, Yonsei University

Equipment

Manufacturer: Unisoki

Equipment: Low Temperature SPM

Model: USM1200

Equipment Status

장비 설치 및 IDLE

Measurement Device

8.1) Brüel & Kjær LAN-XI DAQ Type 3050

-Hardware: B&K Front End Type 3050-A-040

-Software: B&K Pulse Labshop 22 Version

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration specification

Measurement Setup

Bandwidth: 200 Hz

Lines: 800

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

Conclusion

All directions satisfy the vibration specification.

In some frequency bands, the observed vibration amplification is vibration inherent to the USM1200 itself.

Measurement Summary

Measurement location	Status	Direction	Floor vibration	DVIA-ML1000	Floor result	Platform result
연세대학교 양자 이미지 연구실 1. Floor 2. DVIA-ML1000	장비 설치/IDLE	Vertical	VC-G @ 31.5 Hz	VC-G @ 31.5 Hz	✓ PASS	✓ PASS
연세대학교 양자 이미지 연구실 1. Floor 2. DVIA-ML1000	장비 설치/IDLE	Left to Right	VC-G @ 20 Hz	VC-G @ 20 Hz	✓ PASS	✓ PASS
연세대학교 양자 이미지 연구실 1. Floor 2. DVIA-ML1000	장비 설치/IDLE	Front to Back	VC-G @ 20 Hz	VC-G @ 20 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A