Samsung SDI SAMSUNG SAIT DVIA-MB1000 (221214R2-1) ZEISS Geminisem 550 Installation Report
Contents
Overview
The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended. Setup and vibration measurements were performed with the ZEISS equipment powered on.
Vibration Isolation System Information
Model: DVIA-MB1000 — Serial Number: 221214R2-1
Engineer
Sangjae Lee, Jongwon park from DAEIL SYSTEMS
Tuning date
July 26, 2023
Report written date
July 27, 2023
Trip dates
Date of business trip : 17.12.27~17.12.29
Prepared for
Samsung SDI
Location
Samsung SAIT L5 Research Building, B1 Floor, Suwon
Equipment
Manufacturer: ZEISS — FE-SEM — Model: Geminisem 550
Summary of Vibration Results
| Measurement Point | Z-axis (Vertical) 1–10 Hz | Z-axis (Vertical) 10–80 Hz | X-axis (Left to Right) 1–10 Hz | X-axis (Left to Right) 10–80 Hz | Y-axis (Front to Back) 1–10 Hz | Y-axis (Front to Back) 10–80 Hz |
|---|---|---|---|---|---|---|
| Floor | E | F | F | G | G | G |
| Active | G | G | G | G | G | G |
Field Notes
When measuring the MB1000 top plate, the vibration of the ZEISS equipment appears in the 40-63Hz band.
Data and Image
Z-axis (Vertical) Floor VC-Curve
Z-axis (Vertical) DVIA-MB1000 VC-Curve
X-axis (Left to Right) Floor VC-Curve
X-axis (Left to Right) DVIA-MB1000 VC-Curve
Y-axis (Front to Back) Floor VC-Curve
Y-axis (Front to Back) DVIA-MB1000 VC-Curve
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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