LG Display Paju M2 SNU CTQ Equipment DVIA-UB350 (220211R02) Retuning Report — 2022-09-08
Contents
Prepared for
SNU Precision
Engineers
Cheon Seunghoon, Youngha Lee
Tuning date
2022.09.08
Report written date
2022.09.14
Date of business trip
17.12.27~17.12.29
Overview
Inspection and retuning were performed on the DVIA-UB350 active vibration isolation platform to improve horizontal isolation performance. Passive level was adjusted considering stage position, and gain values were increased for retuning; the platform is operating normally.
System information
Model: DVIA-UB350(1260x800)
Serial Number (S/N): 220211R02
Engineer
Cheon Seunghoon and Youngha Lee, DAEIL SYSTEMS (Sales Team and Development Team)
Calendar tuning date
September 8, 2022
Location
LG Display (Paju) M2
Equipment on isolator
SNU CTQ Equipment
Vibration measurement equipment
7.1) PULSE 22
Hardware: Bruel & Kjaer Type 3050-A-040
Software: LapShop Application (PULSE Lapshop)
7.2) Sensor
PCB Accelerometer — Model: 393B05
Summary of vibration measurement results
| Measurement point | Z-axis (Vertical) / 1-10 Hz | Z-axis (Vertical) / 10-80 Hz | X-axis (Left to Right) / 1-10 Hz | X-axis (Left to Right) / 10-80 Hz | Y-axis (Front to Back) / 1-10 Hz | Y-axis (Front to Back) / 10-80 Hz |
|---|---|---|---|---|---|---|
| Floor | C | C | E | D | E | E |
| Top of isolator | G | F | F | E | F | F |
Data and graphs
Z-axis (Vertical) VC curves
Z-axis (Vertical) Transmissibility
-22.93 dB attenuation at 5 Hz, -27.6 dB at 10 Hz
Green: floor vibration; red: top-plate vibration
X-axis (Left to Right) VC curves
X-axis (Left to Right) Transmissibility
-23.45 dB attenuation at 5 Hz, -26.91 dB at 10 Hz
Green: floor vibration; red: top-plate vibration
Y-axis (Front to Back) VC curves
Y-axis (Front to Back) Transmissibility
-19.96 dB attenuation at 5 Hz, -28.03 dB at 10 Hz
Green: floor vibration; red: top-plate vibration
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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