LG Display Paju M2 SNU CTQ Equipment DVIA-UB350 (220211R02) Installation Report

DVIA-ULF Series

Installation Report

LG Display

SNU

SNU Precision

DVIA-UB350

220211R02

Prepared for

SNU Precision

2022.05.12

2022.05.16

17.12.27~17.12.29

The DVIA-UB350 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-UB350(1260x800)

Serial Number: 220211R02

Youngha Lee, from DAEIL SYSTEMS

May 12, 2022

LG Display(Paju) M2, Paju Gyeonggi

SNU CTQ Equipment

7.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

7.2) Sensor

PCB Accelerometer

Model: 393B05

Measurement Point	Z-axis (Vertical) / 1-10 Hz	Z-axis (Vertical) / 10-80 Hz	X-axis (Left to Right) / 1-10 Hz	X-axis (Left to Right) / 10-80 Hz	Y-axis (Front to Back) / 1-10 Hz	Y-axis (Front to Back) / 10-80 Hz
Floor	B	A	B	A	B	C
Active	E	D	C	D	C	E

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A