Installation Report

DVIA-M Series

06-17-2021

Tier-1 Semiconductor ZEISS Crossbeam 550 DVIA-MB1000 (210607R3 P231) Installation Worksheet — 2021.06.16

DVIA-M Series

Installation Report

Tier-1 Semiconductor

ZEISS

Crossbeam 550

DVIA-MB1000

210607R3

P231

B&K PULSE

Target equipment

Zeiss Crossbeam 550

Place of installation

Icheon, Tier-1 Semiconductor P&T Building 1

Remark

Good Performance

End user

Tier-1 Semiconductor

Operator

Kim, DooHyun

Date of setup

21.06.16

Date of reporting

21.06.17

Date of business trip

17.12.27~17.12.29

Vibration isolation system information

Model: DVIA-MB1000

Serial number: 210607R3 (P231)

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

21.06.16 (WED)

Operator: Daeil System, Research engineer Kim, Doohyun

Place of measurement

Icheon, Tier-1 Semiconductor P&T Building 1

Equipment Model

Zeiss Crossbeam 550

Measurement conditions and results

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

Measurement conditions and results - Figure 1

Measurement conditions and results - Figure 2

Measurement conditions and results - Figure 3

Summary of measurement results

Test Condition	VC-Class Z	VC-Class X	VC-Class Y
Floor	D	F	E
Above Active	E	G	E

Good omnidirectional performance.

Measurement summary - Visualization 1

Measurement summary - Visualization 2

Vibration criterion curve

Criterion curve - Z axis

Criterion curve - X axis

Criterion curve - Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A