BOWAY R&D Center TESCAN S9000 DVIA-MB1000 Installation Report — 2019.09.30
Contents
BOWAY R&D CENTER
BOWAY R&D CENTER
(MB1000_190614R1 Set up)
Target equipment
TESCAN S9000
Place of installation
F2, BOWAY R&D CENTER
Remark
Good Performance
END USER
BOWAY
Operator: Choi, Hyoung Mun
Date of setup
19.09.26
Date of reporting
19.09.30
Date of business trip
17.12.27~17.12.29
Overview
After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.
Vibration Isolation System Info
Model: DVIA-MB1000
Serial Number: 190614R1
Equipment
TESCAN S9000
Measurement conditions and results
Measurement date: 2019.09.26 (Thursday),
Operator: Daeil System, Manager Choi, Hyoung Mun
Place of measurement : F2, BOWAY R&D CENTER
Equipment Model: TESCAN S9000
Summary of measurement results
Test Condition
VC-Class
| Test Condition | VC-Class Z | VC-Class X | VC-Class Y |
|---|---|---|---|
| Floor | C | E | E |
| Above Active | G | G | G |
Good omnidirectional performance.
MB1000 internal program performance measurement result
Z axis (MB1000 internal program)
X axis (MB1000 internal program)
Y axis (MB1000 internal program)
Octave Band Result (BASE: Floor, TOP: Above Active)
Z axis (octave band result)
X axis (octave band result)
Y axis (octave band result)
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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