도입사례

YIMO TECH Hitachi High-Tech SU7000 SEM DVIA-ML1000 installation report — the DVIA-ML1000 active vibration isolation platform was installed at Fuzhou for end user Fujian University of Technology, then tuned and measured with the equipment in the IDLE state. Against the SU7000 horizontal and vertical allowable vibration specification (µm pk-pk, 1–10 Hz), the floor and the DVIA-ML1000 platform both passed on the vertical, left-to-right, and front-to-back axes. The tuning request work order, the allowable vibration tables, the per-axis Autospectrum plots and the installation photo are published.

Installation report for the DVIA-ULFB700 vibration isolation platform (S/N 260707R4) supporting an Attocube AttoDRY 2100 cryostat in Room L02, Building 2 of the Electronics and Telecommunications Research Institute (ETRI). Tuning and vibration measurement were performed with the equipment in the IDLE state against a 3.125 µm/s RMS (VC-E) requirement in both the horizontal and vertical directions. On the floor all three axes failed the requirement, while on the isolated DVIA-ULFB700 platform all three axes passed: after the first round of tuning the vertical axis reached VC-F and the horizontal axes reached VC-E. Per-axis VC Curves for the Z, X and Y axes are published.

Installation report for the DVIA-P4000 vibration isolation system, serial 260401R3-1, installed beneath an Advantest E5620 on the 3rd floor of the FAB at a Tier-1 Semiconductor site in Texas, USA. Work completed August 14, 2026. Scope covered rigging and positioning, lifting, setting the platform flush with the raised floor, levelling to within 0.5 mm, and attaching seismic restraints between the floor and the isolator, followed by vibration verification. The equipment manufacturer specifies VC-C (< 12.5 µm/s, 1-80 Hz) in all directions. Measurements were taken in three directions with calibrated seismic accelerometers at a 160 Hz bandwidth, and the DVIA-P4000 PASSED VC-C on Front-Back, Left-Right and Vertical. The allowable vibration specification and all three VC Curves are published.

Installation report for the DVIF-FB-1000x2000x3000H vibration isolation platform (S/N 241001R5) in the 3rd floor cleanroom of the FST Osan plant, covering the performance verification measurement carried out after reinforcement work on the platform top plate. A LAZIN LODAS-B18 photomask blank inspection system is mounted on top. Measurement was performed with the equipment in the IDLE state against a 25 µm/s RMS (VC-B) requirement in both the horizontal and vertical directions. Before reinforcement all three axes exceeded the requirement; afterwards the vertical (Z) axis improved from 27.7 to 17.9 µm/s and the left to right (X) axis from 70.7 to 22.4 µm/s, both satisfying VC-B, while the front to back (Y) axis improved from 71.0 to 48.0 µm/s (32.4% reduction) but remained at the VC-A level. Per-axis before/after VC Curves for the DVIF-FB top plate and per-axis VC Curves measured on the upper equipment stage are published.

Thermo Fisher Scientific Talos FIB-SEM at Broadcast and Television Metrology in Wuxi, China, delivered through the YIMO TECH channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned on June 5, 2026 with the equipment turned on/IDLE. Vertically the floor measured 4.62 µm/s RMS at 15.5 Hz while the DVIA-ML1000 platform stayed at 0.11 µm/s; left to right it went from 0.71 to 0.14 µm/s at 4.5 Hz and front to back from 0.58 to 0.034 µm/s at 3.5 Hz, so every axis passed on both the floor and the platform. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order and the per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published.

Installation report for the DVIA-MB1000 (S/N 161117R3) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. A performance check was followed by vibration measurement with the equipment in the IDLE state. On the floor all three axes measured at the VC-D level, while on the DVIA-MB1000 platform the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so no additional re-tuning was required. Per-axis Autospectrum and VC Curves plus the installation photo are published.