설치 보고서
DVIA-M Series
08-25-2022
ZEISS EVO15 DVIA-M1000 Internal Program Performance Report — Carl Zeiss (Guangzhou, 2022)
DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
EVO15
Carl Zeiss
Guangzhou
(M1000_ 220324R5 Set up)
Carl Zeiss Optics (Guangzhou) Co., Ltd.
| Target equipment | ZEISS EVO15 |
|---|---|
| Place of installation | Guangzhou |
| Remark | Good Performance |
| END USER | Carl Zeiss Optics (Guangzhou) Co., Ltd. |
Operator: Lee, Young Ha
Date of setup: 22.08.16
Date of reporting: 22.08.25
Date of business trip : 17.12.27~17.12.29
개요
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2022.08.16 (Tuesday),
Operator: DAEIL SYSTEMS, Youngha Lee
Place of measurement: Guangzhou
Equipment Model: ZEISS EVO15
MB1000 internal program performance measurement result
Z axis
X axis
Y axis
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설치 보고서
시리즈DVIA-M Series
작성일08-25-2022
태그
DVIA-M Series
Installation Report
DVIA-M1000
ZEISS
EVO15
Carl Zeiss
Guangzhou
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