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설치 보고서
DVIA-P Series
05-21-2026

Tier-1 Semiconductor Advantest E5610 DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
Advantest
E5610
DVIA-P4000

Contents

개요

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

시스템 정보

모델: DVIA-P4000

시리얼 넘버: 190724R2

엔지니어

Doohyun Kim from DAEIL SYSTEMS

Prepared by: Youngha Lee (튜닝일 21.05.13, 보고서 작성일 21.05.14, 출장일 17.12.27~17.12.29)

튜닝 일자

May 13, 2020

설치 위치

1차 반도체 V1 Line 3F, 화성

장비

Advantest E5610

진동 측정 장비

DAQ System: B*K PULSE 22 & LAN-XI Type 3056

Accelerometer: PCB PIEZOTRONICS 393B05

진동 결과 요약

N/A

데이터 및 이미지

Z-axis (Vertical) VC curves

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) VC curves

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) VC curves

Y-axis (Front to Back) Transmissibility

참조

기준 곡선설명Amplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

참고:

1. VC-A/B는 8–80 Hz 1/3 옥타브 밴드, VC-C~G는 1–80 Hz 기준입니다.

2. Detail size는 반도체 라인폭 또는 의료 연구 입자 크기를 뜻합니다.

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카테고리
설치 보고서
시리즈DVIA-P Series
작성일05-21-2026
태그
DVIA-P Series
Installation Report
Tier-1 Semiconductor
Advantest
E5610
DVIA-P4000

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