Installation Report

DVIA-ULF Series

11-18-2025

Espisystems Jarvis E Print Inspection Equipment DVIA-ULF1500 Installation Report

DVIA-ULF Series

Installation Report

Espisystems

Jarvis E

Overview

Tuning and vibration measurements were conducted for the DVIA-ULF1500 installed at the Espisystems 1F equipment room.

Tuning and vibration measurements were performed with the equipment installed and in a Turned off state.

Measurement data are presented as VC curves, together with reference materials on vibration levels.

Vibration Isolation System Information

Model: DVIA-ULF1500

Serial Number: 250904R1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

November 18, 2025

Installation Site

Espisystems 1F equipment room

End User

Espisystems

Customer Equipment

N/A

Equipment specification

Manufacturer: Espisystems

Equipment: Print inspection equipment (printing mold)

Model: Jarvis E

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring Equipment

Data Physics DAQ

- Hardware: QUATTRO, Serial Number: 22436

- Software: SignalCalc ACE

Accelerometer: PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

In the 1–2 Hz range in all directions, isolation performance is approximately 50–70%; at frequencies above 2 Hz, isolation performance is 90% or higher.

Measurement Data

Measuring site	State	Direction	Floor vibration	DVIA-ULF1500
Espisystems 1F equipment room 1. Floor vibration 2. DVIA-ULF1500	Turned off	Vertical	VC-C @ 80 Hz	VC-G @ 80 Hz
		Left to Right	VC-E @ 50 Hz	VC-G @ 50 Hz
		Front to Back	VC-E @ 50 Hz	VC-G @ 50 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A