Installation Report

DVIA-M Series

06-26-2025

LG Innotek DVIA-MO1000 (250409R2) Installation Report

DVIA-M Series

Installation Report

LG Innotek

DVIA-MO1000

Overview

Tuning and vibration measurements were performed for the DVIA-MO1000 installed at LG Innotek's 2nd-floor optical cluster laboratory.

After tuning and vibration measurements with the equipment Turned off, Front-to-back vibration was measured with the equipment Turned on at the customer's request.

The data are presented as VC curves, with reference material on vibration levels.

Vibration isolation platform

Model: DVIA-MO1000

Serial Number: 250409R2

Engineer

Chaewon Lee, DAEIL SYSTEMS

Tuning Date

June 25, 2025

Report written date

June 26, 2025

End User

LG Innotek

Number of Tuning Trial

N/A

Location

LG Innotek Magok site, 2F optical cluster laboratory

Equipment

Manufacturer: N/A

Equipment: N/A

Model: N/A

Equipment Condition

장비 Turned off / Turned on

Measurement Device

9.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Measurement Summary

Measurement site	State	Direction	Floor	DVIA-MO1000
LG Innotek Magok site, 2F optical cluster laboratory 1. Floor 2. DVIA-MO1000	Equipment Turned off	Vertical	VC-C @ 5 Hz	VC-G @ 5 Hz
		Left to Right	VC-E @ 4 Hz	VC-G @ 4 Hz
		Front to Back	VC-E @ 4 Hz	VC-G @ 4 Hz
	Equipment Turned on	Front to Back	VC-E @ 4 Hz	VC-G @ 4 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Front to Back VC Curves (equipment Turned on)

Front to Back Autospectrum (equipment Turned on)

Front to Back Transmissibility (equipment Turned on)

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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