YIMO(Huahong) ASML E-beam Wafer inspection system eScan 460 DVIA-P4000 Installation Report
Contents
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 240424R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Report written date: 2024-10-12
Tuning Date
2024-10-07
Installation Site
Huahong
Equipment
Manufacturer: ASML
Equipment: E-beam Wafer inspection system
Model: eScan 460
Equipment Status
The equipment was installed on the DVIA-P4000 platform. Operation
Number of Tuning Trial
2nd(1st: 24.09.12)
Measurement Device
8.1) Brüel & Kjær LAN-XI DAQ Type 3050
- Hardware: B&K Front End Type 3050-A-040
- Software: B&K Pulse Labshop 22 Version
8.2) Accelerometer
- PCB Accelerometer
- Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration Specification
VC-D
Conclusion
After the installation of the DVIA-P4000, floor vibration was reduced to within the vibration specification in all axes.
Measurement Summary
| Measurement Point | Status | Axis | Vibration Specification | Measurement Data | Result |
|---|---|---|---|---|---|
| FAB 1. Floor 2. DVIA-P4000 | Equipment is installed and operation. | Vertical | 6.25E-06 m/s (VC-D) | VC-F @ 20 Hz | ✓ PASS |
| Left to Right | 6.25E-06 m/s (VC-D) | VC-F @ 2 Hz | ✓ PASS | ||
| Front to Back | 6.25E-06 m/s (VC-D) | VC-F @ 2 Hz | ✓ PASS |
Data and Image
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
