Thermo Fisher Scientific Scios 2 DualBeam - FIB SEM DVIA-MB1000 Installation Report

Installation Reports

Introduction
Summary Results
Product Details
Summary of Work
Procedures
– Vibration
Setup
Specifications
– Specification Summary
– Detailed Specification
Results
– Summary Results
– Detailed Results
Data

• Introduction

This report provides the details of the installation of the MB1000 for the Thermo Fisher Scientific Scios 2 in Lab 123, , 2450 Mariner Square Loop, Alameda, CA 94501. Sila Nanotechnologies hired VEC to install the vibration isolation system and provide a report of the completed work.

• Summary Results

Below is a summary of the results:

MB1000 ON PASSED the Vibration specifications

• Product Details

Part Delivered	Serial Number	Software
MB1000	240213R2	Site-Specific Tune

• Summary of Work

We installed the system by

Positioning the daeil under the microscope
Leveling the daeil to within .5mm
Attaching seismic restraints between the floor and the daeil

We tested the system by

Creating and uploading a site-specific tune
Collecting vibration data to verify the performance

We left the system

In position and on

• Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of g (RMS). The acceleration spectra with 200 bandwidths were recorded.

• Setup

Vibration
Bandwidth	200
Lines	3200
Window	Hanning
Coupling	ICP 2mA
Average Type	Stable
Duration	60
Engineering Units	um/s (RMS)

• Specifications

VEC used the following specifications for the project.

Specification Summary

Tool	Specification
Thermo Fisher Scientific Scios 2	Vibration All Directions SE-tool™ Spec Line g

Detailed Specifications

ACOUSTICS / FLOOR VIBRATIONS ADVISED REDUCTION FACTORS

Sila Nanotechnologires - Scios 2 110mmDC no HWL 1.0nm Multistub 0 Tilt - 11302023 10934 PM 13-15-36 (002)
	Type	Frequency	Current Amplitude	Advised Amplitude	Reduction factor
1	Floor Vertical	2 Hz	7.3	0.58	13
2	Floor Vertical	3.15 Hz	6.4	0.62	10
3	Floor Vertical	2.5 Hz	5.9	0.60	9.9
4	Floor Vertical	4 Hz	7.7	1.2	6.3
5	Floor Left-to-Right	1.25 Hz	1.1	0.23	4.7
6	Floor Left-to-Right	1 Hz	0.84	0.18	4.6
7	Acoustics	315 Hz	48 dB	37 dB	3.7
8	Acoustics	630 Hz	45 dB	34 dB	3.5
9	Acoustics	200 Hz	45 dB	35 dB	3.4
10	Floor Vertical	1.6 Hz	1.9	0.56	3.3
11	Acoustics	125 Hz	55 dB	46 dB	2.9
12	Floor Vertical	5 Hz	6.8	2.5	2.8
13	Acoustics	500 Hz	44 dB	35 dB	2.8
14	Acoustics	160 Hz	53 dB	45 dB	2.4
15	Floor Vertical	6.3 Hz	7.8	3.9	2.0
16	Acoustics	80 Hz	55 dB	49 dB	1.9
17	Acoustics	1000 Hz	42 dB	38 dB	1.7
18	Floor Left-to-Right	0.8 Hz	0.53	0.31	1.7
19	Acoustics	100 Hz	56 dB	51 dB	1.7
20	Acoustics	800 Hz	42 dB	38 dB	1.6
21	Floor Left-to-Right	1.6 Hz	1.1	0.68	1.6
22	Acoustics	400 Hz	43 dB	39 dB	1.5
23	Floor Left-to-Right	0.63 Hz	0.42	0.32	1.3
24	Floor Vertical	8 Hz	9.1	7.0	1.3
25	Floor Vertical	1.25 Hz	0.60	0.52	1.2
26	Floor Left-to-Right	2.5 Hz	2.2	1.9	1.2
27	Floor Left-to-Right	2 Hz	1.3	1.2	1.1
28	Acoustics	250 Hz	39 dB	38 dB	1.1
29	Floor Left-to-Right	0.5 Hz	0.33	0.32 dB	1.0