DVIA-P Series
Pneumatic Force.Semiconductor Precision.
Up to 20,000 kg payload. Pneumatic servo actuators. Ultra-fast settling. Engineered for semiconductor metrology.
0t
Max Load capacity
0%
Isolation at 2 Hz
0DOF
Every axis controlled
<0s
Settling time
Designed for Metrology tools with
nanometer-scale measurements.
Nanometer-scale metrology lives at the noise floor of the building itself. A truck on the loading dock. A pump in the subfab. A door closing two bays away. Each event registers as motion under the column — and at sub-nanometer resolution, that motion becomes the measurement. The DVIA-P was engineered to remove that variable. Active pneumatic isolation cancels disturbance in real time, across all six degrees of freedom, before it ever reaches the stage. What the tool measures is the wafer. Not the floor it stands on