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설치 보고서
DVIA-P Series
05-21-2026

Tier-1 Semiconductor Hwaseong Hitachi CG6300 DVIA-P4000 Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
Hitachi
CG6300
220126R3

Contents

개요

보고 대상: Tier-1 Semiconductor

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

시스템 정보

모델: DVIA-P4000

시리얼 넘버: 220126R3

엔지니어

Engineer: Youngha Lee

Tuning date: 22.05.27

Report written date: 22.05.30

Date of business trip : 17.12.27~17.12.29

Youngha Lee from DAEIL SYSTEMS

튜닝 일자

May 27, 2022

설치 위치

Tier-1 Semiconductor Hwaseong V1 Line 10F

장비

Hitachi CG6300

진동 결과 요약

측정 지점Z축(수직) 1-10 HzZ축(수직) 10-80 HzX축(좌-우) 1-10 HzX축(좌-우) 10-80 HzY축(전-후) 1-10 HzY축(전-후) 10-80 Hz
FloorBBCCBA
ActiveDDDDDC

데이터 및 이미지

Z-axis (Vertical) VC curves

Floor

On active vibration isolation platform

X-axis (Left to Right) VC curves

Floor

On active vibration isolation platform

Y-axis (Front to Back) VC curves

Floor

Above Active isolator

참조

Generic Vibration Criteria

기준 곡선설명Amplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

참고:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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카테고리
설치 보고서
시리즈DVIA-P Series
작성일05-21-2026
태그
DVIA-P Series
Installation Report
Tier-1 Semiconductor
Hwaseong
Hitachi
CG6300
220126R3

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