Installation Report

DVIA-ULF Series

01-13-2026

Tier-1 Semiconductor Fabrication Facility DSR C Tower 3F Research Lab ZEISS GeminiSEM 460 DVIA-ULF1000 Installation Report

DVIA-ULF Series

Installation Report

Tier-1 Semiconductor Fabrication Facility

ZEISS

Overview

Tuning and vibration measurements were completed for the DVIA-ULF1000 installed at Tier-1 Semiconductor Fabrication Facility DSR C Tower, 3rd floor research laboratory.

Tuning and vibration measurements were performed with the equipment Turned on/IDLE.

Measurement data are presented as VC curves, with reference material for vibration level criteria.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 251112R4

Engineer

Chaewon Lee, Field Engineer, DAEIL SYSTEMS

Measurement Date

January 8, 2026

Measuring Location

Tier-1 Semiconductor Fabrication Facility DSR C Tower, 3rd floor research laboratory

End User

Tier-1 Semiconductor Fabrication Facility

Equipment Information

Manufacturer: ZEISS

Equipment: FE-SEM

Model: GeminiSEM 460

Equipment specification

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vibration specifications are satisfied in all directions.

Measurement Data

Measuring Point	Status	Direction	Floor	DVIA-ULF1000	Floor	DVIA-ULF1000
Tier-1 Semiconductor Fabrication Facility DSR C Tower 3F Research Lab 1. Floor vibration 2. DVIA-ULF1000	Turned on/IDLE	Vertical	VC-B @ 10 Hz	VC-G @ 10 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 8 Hz	VC-F @ 8 Hz	✓ PASS	✓ PASS
		Front to Back	VC-E @ 16 Hz	VC-F @ 16 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A