Nano Convergence Technology Institute ZEISS X-ray Microscope Versa 630 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Nano Convergence Technology Institute 4F Line.
Tuning and vibration measurement were performed with the equipment in Turned on/IDLE state.
The data are presented as VC curves, and reference material on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 250805R2
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
December 9, 2025
Report written date
December 10, 2025
Installation Site
Nano Convergence Technology Institute 4F Line
End User
Nano Convergence Technology Institute
Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Versa 630
Specification
Equipment Condition
Equipment installed and IDLE
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
The performance satisfies the vibration specification in all directions.
Measurment Data
| Measurment Point | Status | Specification | AXIS | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Nano Convergence Technology Institute 4F Line 1. Floor 2. DVIA-ML3000 | Equipment installed IDLE | VC-C | Vertical | VC-D @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| VC-C | Left to Right | VC-D @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS | ||
| VC-D | Front to Back | VC-D @ 80 Hz | VC-G @ 80 Hz | ✓ PASS | ✓ PASS | ||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
Share this Case Study
Case Study Information
Related Case Studies
Tier-1 Semiconductor DSR ZEISS Versa 630 X-ray Microscope DVIA-ML3000 (250625R2) Installation Report
Tier-1 Semiconductor Cheonan C5 ZEISS X-ray Microscope Versa 630 DVIA-ML3000 (250225R3) Installation Report
