New National Metrology Centre GBI DVIA-UB700 (220209R02) Installation Report

DVIA-ULF Series

Installation Report

New National Metrology Centre

Singapore

DVIA-UB700

220209R02

GBI

Prepared for

New National Metrology Centre

Engineer: Seounghoon Cheon

Tuning date: 22.09.06

Report written date: 22.09.14

Date of business trip : 17.12.27~17.12.29

The DVIA-UB700 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-UB700

Serial Number: 220209R02

Seounghoon Cheon, from DAEIL SYSTEMS

September 06, 2022

2 Fusionopolis Way, Singapore

GBI system/ 600kg

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A