DAEIL SYSTEMS

DAEIL SYSTEMS

Case Studies

  • PARK SYSTEM XE-100-01 AFM
  • PERSONAL AFM
  • AFM SILCON CANTILEVER IMAGING
  • HOLOGRAPHINC MICROSCOPE
  • 50nm RESOLUTION MICROSCOPE
  • WHITE LIGHT INTERFEROMETER
 

PARK SYSTEM XE-100-01 AFM

 

Pneumatic Vibration Isolation Table Set point : 502.34 (nN)

 

Pneumatic_Vibration_Isolation_Table

Park_system_Pneumatic_Vibration)Isolation_Graph

Pneumatic_Vibration_Isolation_Table

Park_system_Pneumatic_Vibration)Isolation_Graph

 

Active Vibration Isolation Table(DVIA-T45) Set point : 563.25 (nN)

 

Active_Vibration_Isolation_Table

Active_Vibration_Isolation_Graph

Pneumatic_Vibration_Isolation_Table

Park_system_Pneumatic_Vibration)Isolation_Graph

 

The line profile indicates that the nosie of the pneumatic vibration isolation tables is 10 times greater than the active vibration isolation table and the cause of exccessive noise of the XE-100-02 due to the vibration isolation performance difference between the pneumatic vibration isolation table and the active vibration isolation table. The AFM XE-100-01 confirms that it is possible to measure fine samples of the XE-100-02 with DAEIL SYSTEMS's tabletop active vibration isolation platform.

 
 

AFM

 

PERSONAL_AFM_01

PERSONAL_AFM_02

 

Active_Vibration_Isolation_OFF
Active Vibration Isolation OFF

Active_Vibration_Isolation_ON
Active Vibration Isolation ON

PERSONAL_AFM_01

 

PERSONAL_AFM_02

 

Active_Vibration_Isolation_OFF
Active Vibration Isolation OFF

 

Active_Vibration_Isolation_ON
Active Vibration Isolation ON

 
 

AFM SILCON CANTILEVER IMAGING

 

Analysis - frequency

 

Noise_Analysis-Frequency_Graph

Noise_Analysis-Frequency

Noise_Analysis-Frequency_Graph

 

Noise_Analysis-Frequency

 

Analysis - Standard Deviation

Noise_Analysis-Standard_Deviation_Graph

Noise_Analysis-Standard_Deviation

Noise_Analysis-Standard_Deviation_Graph

 

Noise_Analysis-Standard_Deviation

 

Imaging TEST in Different Substrate (Silicon Cantilever)

 

Imaging_TEST_in_Different_Substrate(Silicon_Cantilever)

 
 

HOLOGRAPHINC MICROSCOPE

 
DAE-Tabletop-Acoustic-Enclosure-Option
 

TOMOCUBE 3D HOLOGRAPHIC MICROSCOPE installed on DVIA-T56

 
 

Without active vibration isolation

 
 

With active vibration isolation

 
 

50nm RESOLUTION MICROSCOPE

 
DAE-Tabletop-Acoustic-Enclosure-Option
 

50 nm lateral resolution MICROSCOPE installed on DVIA-T56

 
 
 

Passive vibration isolation

 
 
 

Active vibration isolation

 
 

Passive Vibration Isolation Mode

 

Active Vibration Isolation Mode

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