대일시스템

대일시스템

Active Vibration Isolation Systems

  • KLA STYLUS PROFILER ALPHA-STEP D-600
  • BRUKER AFM MULTIMODE
  • DOWNLOAD
 

KLA STYLUS PROFILER
ALPHA-STEP D-600

 

KLA STYLUS PROFILER ALPHA-STEP D-600

 
z axis graph

The measured vertical floor vibration exceeded the floor vibration specification VC-D below 10 Hz and 16 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-E.

 
generic vibration criteria
 
 
 

BRUKER AFM MULTIMODE

 

BRUKER_AFM_MULTIMODE

 
Test Result Summary
Frequency Range 1 - 80 Hz
Floor Vibration Specification VC-D
Measurement Direction Z-axis
(Vertical)
X-axis
(Left to Right)
Y-axis
(Front to Back)
Floor Vibration Fail Fail Fail
Vibration On Active Vibration Isolation System Pass Pass Pass
 
DVIA-T_active_vibration_isolation_system_z_axis_graph

The measured vertical floor vibration exceeded the floor vibration specification at 3.15 Hz and 8 Hz to 50 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-F.

 

DVIA-T_active_vibration_isolation_system_x_axis_graph

The measured X-axis floor vibration exceeded the floor vibration specification at 5 Hz. The DVIA-T45 active vibration isolation system reduced the X-axis floor vibration from VC-C to VC-F

 

DVIA-T_active_vibration_isolation_system_y_axis_graph

The measured Y-axis floor vibration exceeded the floor vibration specification at 2.5 Hz and 12.5 Hz. The DVIA-T45 active vibration isolation system reduced the Y-axis floor vibration from VC-C to VC-F.

 
Generic_Vibration_Criteria_Bruker