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Pneumatic Vibration Isolation Mounts
DVIM-T type

Faster payload setting times than conventional ones.
Less vibration induced by air currents and acoustic noise as well as ※on board§ generated forces.
※Stiffer§ feel to isolated surfaces while maintaining high vibration isolation efficiency. (1.5 Hz)
Faster throughput and higher yields for semiconductor, FPD manufacturing/inspection machines.
Greater damping up to five times than conventional ones.


X-Y Positioning System.
Processing/inspection equipment for FPD.
Manufacturing/Inspection Equipment for Semiconductor.		 Coordinate Measuring Machines.
Precision Measuring Machines.


Vibration Isolation : Pneumatic Isolation Type.
Natural Frequency : 1.5 ~ 2.0 Hz
Roll-off Rate [10 Hz] : 32 ~ -35 dB
Damping : Viscous Fluid Damping. (1 chamber)		 Leveling : Auto Leveling by 3 level controllers.
Leveling Accuracy : ▽0.05 mm/ ▽0.1 mm.
Air Supply : 4~6kg/妓 Compressed Air.

Model No.

DVIM-T-500

DVIM-T-1000

DVIM-T-1500

DVIM-T-2500

DVIM-T-3500

DVIM-T-4500

DVIM-T-6000

Dimension
(W x D x H 妙)

210 x 210 x 220

260 x 260 x 220

310 x 310 x 220

340 x 340 x 220

380 x 380 x 220

430 x 430? x 220

490 x 490 x 220

Location of Bolt hole
(A x A 妙)

180

230

280

280

330

380

440

Diameter of Bolt hole
(C 妙)

白 12

白14

白14

白14

白14

白14

白14

Load Capacity (kg/ea)

500

1000

1500

2500

3500

4500

6000

Production Weight (kg/ea)

37

42

72

85

100

125

180

The custom dimensions are available upon request beside standard size.
Above specification would be changed without notice for improvements.
Load capacity is based on air-pressure of 4 bar.

 

Optical Tables Company Daeil systems provide vibration problem, precision vibration isolation, industrial application, passive isolation system.
Office: 475-3, Maengri, Wonsam-myun, Yongin, Gyunggido, Korea l Phone: +82-31-339-3375 l Fax: +82-31-339-3376 Inquiry: daeil@daeilsys.com
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