Products > Isolation Mounts > DVIM series M type

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Pneumatic Vibration Isolation Mounts
DVIM-M type

The optional standard heights 170 妙/195 妙 easy to use, less space for installation.
Unit shape easily attached/installed to equipment.
Provides both vibration isolation performance and stiffness.
 Additional safety valves restrains the payload form being over travel.
Enough stiffness to keep the payload quiet for a high speed X-Y stage.
Faster throughput and higher yieds for equipment.


X-Y Positioning System.
Processing/inspection equipment for FPD.
Manufacturing/Inspection Equipment for Semiconductor.
 Coordinate Measuring Machines.
Precision Measuring Machines.



Vibration Isolation : Pneumatic Isolation Type.
Natural Frequency : 2.3 ~ 2.8 Hz
Roll-off Rate [10 Hz] : over -20 ~ -24 dB
Damping : Air Damping by orifice.(2 chamber)
 Leveling : Auto Leveling by 3 level controllers.
Leveling Accuracy : ▽0.05 mm/ ▽0.1 mm.
Air Supply : 4~6kg/妓 Compressed Air.

Model No.

Dimension
(W x D x H 妙)

Location of Bolt hole
(A x A 妙)

Diameter of Bolt hole
(C 妙)

Load Capacity
(kg/ea)

Production Weight
(kg/ea)

DVIM-M-150

180 x 180 x 170

160

白10

150

11

DVIM-M-300

200 x 200 x 170

180

白10

300

14

DVIM-M-600

240 x 240 x 170

210

白10

600

22

DVIM-M-900

260 x 260 x 195

230

白14

900

38

DVIM-M-1200

290 x 290 x 195

260

白14

1200

46
DVIM-M-1500
320 x 320 x 195
290
白14
1500
53
DVIM-M-2000
370 x 370 x 195
340
白14
2000
57
DVIM-M-2500
390 x 390 x 195
260
白14
2500
68
DVIM-M-3000
440 x 440 x 195
410
白14
3000
85
DVIM-M-4000
490 x 490 x 195
460
白14
4000
110

The custom dimensions are available upon request beside standard size.
Above specification would be changed without notice for improvements.
Load capacity is based on air-pressure of 3 bar.

Optical Tables Company Daeil systems provide vibration problem, precision vibration isolation, industrial application, passive isolation system.
Office: 475-3, Maengri, Wonsam-myun, Yongin, Gyunggido, Korea l Phone: +82-31-339-3375 l Fax: +82-31-339-3376 Inquiry: daeil@daeilsys.com
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