Active Vibration Isolation
Equipment
|
Active
Tabletop Isolation System MATIS series

MATIS (Meiritsu Active Tabletop
Isolation System) series of Meiritsu Seiki are Tabletop / Desk type
of active vibration isolation systems which include vertical and
horizontal sensors and actuators within their thin, compact forms.
Easy to install, appropriate to use like an OA desk, MATIS series
have high performance of vibration isolation and damping and provide
vibration free environment for measurement, manufacturing and precise
work which support advanced technology.
MATIS isolates
low frequency vibration which can not be isolated by passive isolator.
Resonance due to natural frequency is often a problem
in frequency range of several Hertz with passive isolator. Active
vibration control eliminates this resonance and realizes high performance
in this frequency range. For example floor vibration of low frequency
around 2Hz will be decreased to one thirtieth compared to passive
isolators.

Pneumatic suspension
provides isolation up to high frequency range.
In the case of coil spring suspension, surging problem sometimes
affect the isolation performance in high frequency range. MATIS
are supported by air springs of the same type as large isolator
has despite its small form, and provide surging free isolation performance.
Also, it requires only small amount of air supply with its hybrid
of air spring height control and linear motor vibration control
and is free from large air flow consumption.

ATT series are
designed small and thinly enough for installing everywhere easily
/ ADT series are supported with rigid frame.
Small size ATT series isolator can be installed within your instrument
which works well only on vibration isolated platform. With just
supplying air and AC power, isolated surfaces will be realized.
ADT series Desk are supported by rigid base frame and minimize affection
by frame resonance to achieve better isolation performance. Controller
of MATIS series are stable enough so you can use them within your
company and you can also include them as part of your company's
product.

Steel honeycomb
platform is light weight and high rigidity.
In 1974 Meiritsu started manufacturing Aluminum honeycomb platform
for the first time in Japan. ADT series desk / ATT series tabletop
has steel honeycomb platform that has been developed through further
work. It has rigidity of 30-40% higher than aluminum honeycomb platform
and same rigidity as Steel bulk platform with one fifth or one seventh
of weight. This platform has high damping performance with cores
and steel plates attached with small pitches and dampens its own
vibration caused by external disturbance.
Small size ATT series
has lightweight, rigid aluminum platform. This minimizes total weight
and height and also minimizes the effort of relocation and enlarges
the possibility of the sites where your instruments can be set up.

MATIS series is
one of the indispensable parts for your best result.
There are a lot of instruments which work with its
proper performance only on vibration isolated surfaces, platforms
or floors. In the field of STM or AFM which makes nano-meter order
range visible, vibration isolator is one of the indispensable parts.
Fine tuning with instruments on isolator enables the best vibration
isolation performance.
SPECIFICATIONS
|
MATIS
(Tabletop) |
MATIS
(Desk) |
Controller |
Model |
ATT-0605 |
ATT-0806 |
ATT-1007 |
ADT-0605 |
ADT-0806 |
ADT-1007 |
MCA-2B |
Dimensions
[mm] |
623x543x103 |
804x604x166 |
1004x704x166 |
702x602x750 |
902x702x750 |
1102x802x750 |
177x280x260 |
Mass
[kg] |
40 |
80 |
125 |
100 |
125 |
150 |
5.5 |
Platform
size [mm] |
590x510 |
800x600 |
1000x700 |
590x510 |
800x600 |
1000x700 |
- |
Net
load mass capacity [kg] |
150 |
- |
Supply
air pressure [Mpa] |
0.35 - 0.8
(dry, clean air) |
- |
Supply
AC power
Consumption |
- |
AC100V
210W |
Load
mass natural frequency [Hz] |
over 200
(recommended) |
- |
Isolating
/ Damping method |
Linear motor
vibration control |
- |
Leveling
method |
Mechanical
valve leveling |
- |
Isolation
performance |
Refer to
diagram below |
- |
Control
DOF |
6 |
- |
|